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Norm

ÖNORM EN ISO 14644-8

Issue date: 2013 06 01

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)

This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concen...
Withdrawn: 2022 10 15
Publisher:
Austrian Standards International
Format:
Digital | 25 Pages
Language:
German | English
Optionally co-design standards:
This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification. This part of ISO 14644 currently considers only concentrations of air chemical contaminants between 100 and 10-12 g/m3 under cleanroom operational conditions. This part of ISO 14644 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of this part of ISO 14644 to describe the nature of air chemical contaminants. This part of ISO 14644 does not give a classification of surface chemical contamination.
ÖNORM EN ISO 14644-8
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Norm
ISO 14644-6:2007
Issue date : 2007 07 04
Cleanrooms and associated controlled environments — Part 6: Vocabulary
Norm
ÖNORM EN ISO 14644-8
Issue date : 2022 10 15
Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)
Norm
ISO 14644-8:2013
Issue date : 2013 02 18
Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)