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Norm
ISO 14644-6:2007
Issue date: 2007 07 04
Cleanrooms and associated controlled environments — Part 6: Vocabulary
ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.
Withdrawn: 2014 04 23
Publisher:
International Organization for Standardization
Format:
Digital | 34 Pages
Language:
English
ICS
ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.
ISO 14644-6:2007
2007 07 04
Cleanrooms and associated controlled environments — Part 6: Vocabulary
Norm
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