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Norm
ÖNORM EN ISO 14644-2
Issue date: 2016 05 15
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015)
This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean
zone performance related to air cleanliness by particle concentration,...
Valid
Publisher:
Austrian Standards International
Format:
Digital | 21 Pages
Language:
German
| English
| Download GER/ENG
Optionally co-design standards:
ICS
This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean
zone performance related to air cleanliness by particle concentration, based upon parameters that
measure or affect airborne particle concentration.
This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general
maintenance of the engineering systems. It does not provide for monitoring of particle populations
that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of
ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
ÖNORM EN ISO 14644-2
2016 05 15
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanr...
Norm
↖
ÖNORM EN ISO 14644-2
2001 02 01
Ceanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring...
Norm
Norm
Issue date :
2015 12 09
Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
Norm
Issue date :
2015 12 09
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
