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Norm

ISO 21501-4:2018

Ausgabedatum: 2018 05 18

Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces

This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and...
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Herausgeber:
International Organization for Standardization
Format:
Digital | 25 Seiten
Sprache:
Englisch

This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this document is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 µm and 10 µm in particle size.

Instruments that conform to this document are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644-1 and ISO 14644-2, as well as the measurement of number and size distribution of particles in various environments.

The following parameters are within the scope of this document:

— size setting error;

— counting efficiency;

— size resolution;

— false count;

— maximum particle number concentration;

— sampling flow rate error;

— sampling time error;

— response rate;

— calibration interval;

— reporting results from test and calibration.

ISO 21501-4:2018
2018 05 18
Determination of particle size distribution — Single particle light interaction methods — Part 4: Li...
Norm
ISO 21501-4:2007
2007 05 07
Determination of particle size distribution — Single particle light interaction methods — Part 4: Li...
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ISO 13323-1:2000
2000 11 02
Determination of particle size distribution — Single-particle light interaction methods — Part 1: Li...
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